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1. SPPARKS-for-ALD_Ta2O5 SPPARKS-for-ALD_Ta2O5 Public

   This is a SPPARKS version design for Ta2O5 thin film ALD growth KMC simulation

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2. SPPARKS-FOR-WINDOWS SPPARKS-FOR-WINDOWS Public

   If you want SPPARKS run on a windows machine, please overwrite the following files

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3. VESTA VESTA Public

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5. SPPARKS_TMA-H2O SPPARKS_TMA-H2O Public

   spparks for TMA&H2O ALD

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